Fabrication of complex 3D structures using Step and Flash Imprint Lithography (S-FIL)

J Kettle, RT Hoyle, Stefan Dimov, RM Perks

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	Microelectronic Engineering
Publication status	Published - 1 Jan 2008

Cite this

@article{f58d15d290e34c60aece837dd878c955,

title = "Fabrication of complex 3D structures using Step and Flash Imprint Lithography (S-FIL)",

author = "J Kettle and RT Hoyle and Stefan Dimov and RM Perks",

year = "2008",

month = jan,

day = "1",

language = "English",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

}