Fabrication of AI O /SiC composite microcomponents using non-aqueous suspension

Physics & Astronomy

• composite materials 69%
• fabrication 69%
• ceramics 57%
• polycarbosilanes 44%
• inert atmosphere 37%
• composite structures 32%
• photolithography 31%
• drying 28%
• surface roughness 24%
• lithography 23%
• aluminum oxides 23%
• electron microscopes 22%
• microscopes 22%
• sintering 21%
• preparation 20%
• damage 20%
• scanning 17%
• cavities 17%
• high resolution 17%

Engineering & Materials Science

• Molds 100%
• Fabrication 84%
• Composite materials 66%
• Photolithography 35%
• Lithography 31%
• Composite structures 29%
• Alumina 28%
• Microscopes 27%
• Drying 27%
• Sintering 27%
• Electron microscopes 26%
• Surface roughness 23%
• Scanning 21%
• Chemical analysis 18%

Chemistry

• Suspension 88%
• Ceramic 65%
• Composite Material 56%
• Force 38%
• Inert Atmosphere 31%
• Surface Roughness 28%
• Sintering 23%
• Electron Particle 15%