Fabrication of AI O /SiC composite microcomponents using non-aqueous suspension

A method for fabrication of high resolution Al O /SiC composite microcomponents using soft-lithography and non-aqueous ceramic suspension, was reported. Polycarbosilane polysilazane (PSZ) was used in this study to provide binding force and SiC composition. This fabrication process involved fabrication of ultra-thick SU-8 master molds using photolithography, fabrication of soft molds, preparation of non-aqueous ceramic suspension to fill micro features of soft molds, filling the PDMS cavities with non-aqueous ceramic suspension, drying, demolding, and sintering in inert atmosphere. Scanning electron microscope (SEM) and atomic force microscope were used to analyze the microcomponents and determine the surface roughness. It was observed that a damage free Al O /SiC composite structures can be prepared using non-aqueous alumina composite suspension.