Fabrication of a micro-size diamond tool using a focused ion beam

X. Ding; G. C. Lim; C. K. Cheng; David Lee Butler; K. C. Shaw; K. Liu; W. S. Fong

doi:10.1088/0960-1317/18/7/075017

Fabrication of a micro-size diamond tool using a focused ion beam

X. Ding^*, G. C. Lim, C. K. Cheng, David Lee Butler, K. C. Shaw, K. Liu, W. S. Fong

^*Corresponding author for this work

Engineering

Research output: Contribution to journal › Article › peer-review

51 Citations (Scopus)

Abstract

An investigation on the feasibility of sputtering a diamond block into a specially designed three-dimensional cutting tool shape using a focused ion beam (FIB) was carried out. The ion-sputtered removal rate, surface morphology and sputtered feature accuracy were evaluated with respect to the FIB parameters such as ion current and angle of ion incidence through sputtering pockets on the top surface of a diamond substrate. A single crystalline diamond tool, with 25 νm length in the cutting edge and smooth face quality, has been successfully fabricated by using a FIB. These excellent tool characteristics are proven in the results obtained from the machining experiments done on the ultra-precision machine.

Original language	English
Article number	075017
Journal	Journal of Micromechanics and Microengineering
Volume	18
Issue number	7
DOIs	https://doi.org/10.1088/0960-1317/18/7/075017
Publication status	Published - 1 Aug 2008

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanics of Materials
Mechanical Engineering
Electrical and Electronic Engineering

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10.1088/0960-1317/18/7/075017

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title = "Fabrication of a micro-size diamond tool using a focused ion beam",

abstract = "An investigation on the feasibility of sputtering a diamond block into a specially designed three-dimensional cutting tool shape using a focused ion beam (FIB) was carried out. The ion-sputtered removal rate, surface morphology and sputtered feature accuracy were evaluated with respect to the FIB parameters such as ion current and angle of ion incidence through sputtering pockets on the top surface of a diamond substrate. A single crystalline diamond tool, with 25 νm length in the cutting edge and smooth face quality, has been successfully fabricated by using a FIB. These excellent tool characteristics are proven in the results obtained from the machining experiments done on the ultra-precision machine.",

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AU - Ding, X.

AU - Lim, G. C.

AU - Cheng, C. K.

AU - Butler, David Lee

AU - Shaw, K. C.

AU - Liu, K.

AU - Fong, W. S.

PY - 2008/8/1

Y1 - 2008/8/1

N2 - An investigation on the feasibility of sputtering a diamond block into a specially designed three-dimensional cutting tool shape using a focused ion beam (FIB) was carried out. The ion-sputtered removal rate, surface morphology and sputtered feature accuracy were evaluated with respect to the FIB parameters such as ion current and angle of ion incidence through sputtering pockets on the top surface of a diamond substrate. A single crystalline diamond tool, with 25 νm length in the cutting edge and smooth face quality, has been successfully fabricated by using a FIB. These excellent tool characteristics are proven in the results obtained from the machining experiments done on the ultra-precision machine.

AB - An investigation on the feasibility of sputtering a diamond block into a specially designed three-dimensional cutting tool shape using a focused ion beam (FIB) was carried out. The ion-sputtered removal rate, surface morphology and sputtered feature accuracy were evaluated with respect to the FIB parameters such as ion current and angle of ion incidence through sputtering pockets on the top surface of a diamond substrate. A single crystalline diamond tool, with 25 νm length in the cutting edge and smooth face quality, has been successfully fabricated by using a FIB. These excellent tool characteristics are proven in the results obtained from the machining experiments done on the ultra-precision machine.

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JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 7

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ER -

Fabrication of a micro-size diamond tool using a focused ion beam

Abstract

ASJC Scopus subject areas

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