Fabrication of 316-L stainless steel micro parts by softlithography and powder metallurgy

K Jiang; Isaac Chang; M Imbaby

doi:10.1016/j.matlet.2008.06.049

Fabrication of 316-L stainless steel micro parts by softlithography and powder metallurgy

K Jiang, Isaac Chang, M Imbaby

Metallurgy and Materials

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27 Citations (Scopus)

Abstract

This paper presents an approach to fabricate 316-L stainless steel micro parts with complex shapes using soft lithographical and powder metallurgical techniques. The process includes production of high quality deep micro SU-8 master moulds and their negative replicas in polyclimethylsiloxane (PDMS). Then the PDMS soft moulds are filled with slurry containing superfine (<4 um) stainless steel particles and binder. When the slurry is dry, green patterns are removed from the PDMS moulds before the patterns are de-bound and sintered in the tube furnace at 1200 in forming gas atmosphere. The resultant micro parts show high shape retention. The linear shrinkage of the sintered part is measured and found to be 17%. (c) 2008 Elsevier B.V. All rights reserved.

Original language	English
Pages (from-to)	4213-4216
Number of pages	4
Journal	Materials Letters
Volume	62
Issue number	26
DOIs	https://doi.org/10.1016/j.matlet.2008.06.049
Publication status	Published - 15 Oct 2008

Keywords

sintering
SU-8 mould
metallurgy
PDMS
316-L stainless steel

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10.1016/j.matlet.2008.06.049

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@article{eafdf4c60a2f48adbad2298c4759f893,

title = "Fabrication of 316-L stainless steel micro parts by softlithography and powder metallurgy",

abstract = "This paper presents an approach to fabricate 316-L stainless steel micro parts with complex shapes using soft lithographical and powder metallurgical techniques. The process includes production of high quality deep micro SU-8 master moulds and their negative replicas in polyclimethylsiloxane (PDMS). Then the PDMS soft moulds are filled with slurry containing superfine (<4 um) stainless steel particles and binder. When the slurry is dry, green patterns are removed from the PDMS moulds before the patterns are de-bound and sintered in the tube furnace at 1200 in forming gas atmosphere. The resultant micro parts show high shape retention. The linear shrinkage of the sintered part is measured and found to be 17%. (c) 2008 Elsevier B.V. All rights reserved.",

keywords = "sintering, SU-8 mould, metallurgy, PDMS, 316-L stainless steel",

author = "K Jiang and Isaac Chang and M Imbaby",

year = "2008",

month = oct,

day = "15",

doi = "10.1016/j.matlet.2008.06.049",

language = "English",

volume = "62",

pages = "4213--4216",

journal = "Materials Letters",

publisher = "Elsevier",

number = "26",

}

TY - JOUR

T1 - Fabrication of 316-L stainless steel micro parts by softlithography and powder metallurgy

AU - Jiang, K

AU - Chang, Isaac

AU - Imbaby, M

PY - 2008/10/15

Y1 - 2008/10/15

N2 - This paper presents an approach to fabricate 316-L stainless steel micro parts with complex shapes using soft lithographical and powder metallurgical techniques. The process includes production of high quality deep micro SU-8 master moulds and their negative replicas in polyclimethylsiloxane (PDMS). Then the PDMS soft moulds are filled with slurry containing superfine (<4 um) stainless steel particles and binder. When the slurry is dry, green patterns are removed from the PDMS moulds before the patterns are de-bound and sintered in the tube furnace at 1200 in forming gas atmosphere. The resultant micro parts show high shape retention. The linear shrinkage of the sintered part is measured and found to be 17%. (c) 2008 Elsevier B.V. All rights reserved.

AB - This paper presents an approach to fabricate 316-L stainless steel micro parts with complex shapes using soft lithographical and powder metallurgical techniques. The process includes production of high quality deep micro SU-8 master moulds and their negative replicas in polyclimethylsiloxane (PDMS). Then the PDMS soft moulds are filled with slurry containing superfine (<4 um) stainless steel particles and binder. When the slurry is dry, green patterns are removed from the PDMS moulds before the patterns are de-bound and sintered in the tube furnace at 1200 in forming gas atmosphere. The resultant micro parts show high shape retention. The linear shrinkage of the sintered part is measured and found to be 17%. (c) 2008 Elsevier B.V. All rights reserved.

KW - sintering

KW - SU-8 mould

KW - metallurgy

KW - PDMS

KW - 316-L stainless steel

U2 - 10.1016/j.matlet.2008.06.049

DO - 10.1016/j.matlet.2008.06.049

M3 - Article

VL - 62

SP - 4213

EP - 4216

JO - Materials Letters

JF - Materials Letters

IS - 26

ER -

Fabrication of 316-L stainless steel micro parts by softlithography and powder metallurgy

Abstract

Keywords

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