Fabrication and validation of fused silica NIL templates incorporating different length scale features

G Lalev, P Petkov, N Sykes, H Hirshy, V Velkova, Stefan Dimov, D Barrow

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Original language	English
Pages (from-to)	705-708
Number of pages	4
Journal	Microelectronic Engineering
Volume	86
Issue number	4-6
Publication status	Published - 1 Jan 2009

Cite this

@article{a62c45c4e5814069a8c6f264302bab63,

title = "Fabrication and validation of fused silica NIL templates incorporating different length scale features",

author = "G Lalev and P Petkov and N Sykes and H Hirshy and V Velkova and Stefan Dimov and D Barrow",

year = "2009",

month = jan,

day = "1",

language = "English",

volume = "86",

pages = "705--708",

journal = "Microelectronic Engineering",

issn = "1873-5568",

publisher = "Elsevier",

number = "4-6",

}

TY - JOUR

T1 - Fabrication and validation of fused silica NIL templates incorporating different length scale features

AU - Lalev, G

AU - Petkov, P

AU - Sykes, N

AU - Hirshy, H

AU - Velkova, V

AU - Dimov, Stefan

AU - Barrow, D

PY - 2009/1/1

Y1 - 2009/1/1

M3 - Article

SN - 1873-5568

VL - 86

SP - 705

EP - 708

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 4-6

ER -