Fabrication and quality factor control of a microelectromechanical system resonator with linear differential drive

Keyphrases

• Resonator 100%
• Micro-electro-mechanical Systems 100%
• Differential Drive 100%
• Quality Factor Control 100%
• Linear Relationship 66%
• Driving Voltage 66%
• AC Drives 66%
• Differential Readout 66%
• High Aspect Ratio 33%
• Low Pressure 33%
• Atmospheric Pressure 33%
• Resonant Frequency 33%
• Detection Method 33%
• Harmonic Frequency 33%
• Phase Detection 33%
• Silicon-on-insulator 33%
• High Quality Factor 33%
• Second Harmonic 33%
• Force Feedback 33%
• Resultant Force 33%
• Micromachining Technique 33%
• Applied Force 33%
• Low-quality Factor 33%
• Common Mode Signals 33%
• Slope Detection 33%
• Driving Method 33%
• Readout Architecture 33%
• Resonant System 33%
• Resistance to Motion 33%
• Electronic Readout 33%
• Air Damping 33%
• Feedback Technique 33%

Engineering

• Resonator 100%
• Q Factor 100%
• Microelectromechanical System 100%
• Linear Relationship 33%
• Drive Voltage 33%
• High Aspect Ratio 16%
• Harmonics 16%
• Atmospheric Pressure 16%
• Resonant Frequency 16%
• Detection Technique 16%
• Silicon on Insulator 16%
• High Quality Factor 16%
• Micro Machining 16%
• Mode Signal 16%
• Applied Force 16%
• Force Feedback 16%
• Common Mode 16%
• Resultant Force 16%