Abstract
Functionally graded materials (FGMs) are fabricated using various processes and show promise in applications. There has been little research into producing FGMs for microelectromechanical systems. This chapter discusses a novel process for fabricating FGM micro-ceramic components. The process can produce ceramic micro-components with different materials on either side of a layer. The alumina/zirconia FGM was developed for micro-components with the properties of both alumina and zirconia. Multi-layer FGMs are produced using highly stable alumina/zirconia suspensions. Suspension stability was achieved by controlling both pH and the concentration of dispersant with respect to the powder weight. Crack and camber problems were minimized by controlling the green and sintered conditions. A nearly net-shape alumina/zirconia micro-ceramic component with a composition gradient was produced.
| Original language | English |
|---|---|
| Title of host publication | Advances in Ceramic Matrix Composites |
| Publisher | Elsevier (Singapore) Pte Ltd |
| Pages | 611-623 |
| Number of pages | 13 |
| ISBN (Print) | 9780857091208 |
| DOIs | |
| Publication status | Published - Feb 2014 |
Keywords
- Functionally graded material
- Micro-ceramic
- Micro-fabrication
- Soft lithography
ASJC Scopus subject areas
- Materials Science(all)