Estimation of AFM Tip Shape and Status in Linewidth and Profile Measurement

G Han; Z Jiang; W Jing; Philip Prewett; Kyle Jiang

doi:10.1166/jnn.2011.4032

Estimation of AFM Tip Shape and Status in Linewidth and Profile Measurement

G Han, Z Jiang, W Jing, Philip Prewett, Kyle Jiang

Mechanical Engineering

Research output: Contribution to conference (unpublished) › Paper

4 Citations (Scopus)

Original language	English
Pages	11041-11044
Number of pages	4
DOIs	https://doi.org/10.1166/jnn.2011.4032
Publication status	Published - 1 Dec 2011
Event	3rd IEEE International NanoElectronics Conference (INEC)/Symposium on Nanoscience and Nanotechnology in China, Jan 03-08, 2010. Hong Kong, Peoples R China - Duration: 1 Dec 2011 → …

Conference

Conference	3rd IEEE International NanoElectronics Conference (INEC)/Symposium on Nanoscience and Nanotechnology in China, Jan 03-08, 2010. Hong Kong, Peoples R China
Period	1/12/11 → …

Keywords

Linewidth and Profile Measurement
Atomic Force Microscopy (AFM)
Tip Characterization
Scanning Electron Microscope (SEM)

Access to Document

10.1166/jnn.2011.4032

Cite this

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title = "Estimation of AFM Tip Shape and Status in Linewidth and Profile Measurement",

keywords = "Linewidth and Profile Measurement, Atomic Force Microscopy (AFM), Tip Characterization, Scanning Electron Microscope (SEM)",

author = "G Han and Z Jiang and W Jing and Philip Prewett and Kyle Jiang",

year = "2011",

month = dec,

day = "1",

doi = "10.1166/jnn.2011.4032",

language = "English",

pages = "11041--11044",

note = "3rd IEEE International NanoElectronics Conference (INEC)/Symposium on Nanoscience and Nanotechnology in China, Jan 03-08, 2010. Hong Kong, Peoples R China ; Conference date: 01-12-2011",

}

Han, G, Jiang, Z, Jing, W, Prewett, P & Jiang, K 2011, 'Estimation of AFM Tip Shape and Status in Linewidth and Profile Measurement', Paper presented at 3rd IEEE International NanoElectronics Conference (INEC)/Symposium on Nanoscience and Nanotechnology in China, Jan 03-08, 2010. Hong Kong, Peoples R China, 1/12/11 pp. 11041-11044. https://doi.org/10.1166/jnn.2011.4032

Estimation of AFM Tip Shape and Status in Linewidth and Profile Measurement. / Han, G; Jiang, Z; Jing, W et al.
2011. 11041-11044 Paper presented at 3rd IEEE International NanoElectronics Conference (INEC)/Symposium on Nanoscience and Nanotechnology in China, Jan 03-08, 2010. Hong Kong, Peoples R China.

Research output: Contribution to conference (unpublished) › Paper

TY - CONF

T1 - Estimation of AFM Tip Shape and Status in Linewidth and Profile Measurement

AU - Han, G

AU - Jiang, Z

AU - Jing, W

AU - Prewett, Philip

AU - Jiang, Kyle

PY - 2011/12/1

Y1 - 2011/12/1

KW - Linewidth and Profile Measurement

KW - Atomic Force Microscopy (AFM)

KW - Tip Characterization

KW - Scanning Electron Microscope (SEM)

U2 - 10.1166/jnn.2011.4032

DO - 10.1166/jnn.2011.4032

M3 - Paper

C2 - 22409052

SP - 11041

EP - 11044

T2 - 3rd IEEE International NanoElectronics Conference (INEC)/Symposium on Nanoscience and Nanotechnology in China, Jan 03-08, 2010. Hong Kong, Peoples R China

Y2 - 1 December 2011

ER -