Original language | English |
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Pages | 392-400 |
Number of pages | 9 |
DOIs | |
Publication status | Published - 1 Sept 2004 |
Event | 17th European Conference on Solid-State Transducers (Eurosensors XVII), Sep 21-24, 2003. Guimaraes, Portugal - Duration: 1 Sept 2004 → … |
Conference
Conference | 17th European Conference on Solid-State Transducers (Eurosensors XVII), Sep 21-24, 2003. Guimaraes, Portugal |
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Period | 1/09/04 → … |
Keywords
- MEMS
- Q magnification
- resonant sensor
- simulation