Dissociative electron attachment to the highly reactive difluoromethylene molecule-importance of CF2 for negative ion formation in fluorocarbon plasmas

K Graupner, TA Field, Christopher Mayhew

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

Dissociative electron attachment to the highly reactive difluoromethylene molecule, CF2, produced in a C3F6/He microwave plasma and stepwise via the fast atom reaction CF3I + H --> CF3 + HI and CF3 + H --> CF2 + HF, has been investigated. The upper limit for the cross section of formation of F- via dissociative electron attachment to CF2 is estimated to be 5 x 10(-4) angstrom(2). This value is four orders of magnitude smaller than the cross section previously predicted from scattering calculations. It is concluded that difluoromethylene plays a negligible role in negative ion formation in fluorocarbon plasmas.
Original languageEnglish
Pages (from-to)083035
Number of pages1
JournalNew Journal of Physics
Volume12
DOIs
Publication statusPublished - 1 Aug 2010

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