Diffraction stress analysis in fiber-textured TiN thin films grown by ion-beam sputtering: Application to (001) and mixed (001)+(111) texture

G Abadias; Yau Tse

doi:10.1063/1.1646444

Diffraction stress analysis in fiber-textured TiN thin films grown by ion-beam sputtering: Application to (001) and mixed (001)+(111) texture

G Abadias
, Yau Tse

Metallurgy and Materials

Research output: Contribution to journal › Article

73 Citations (Scopus)

Original language	English
Pages (from-to)	2414-2428
Number of pages	15
Journal	Journal of Applied Physics
Volume	95
Issue number	5
DOIs	https://doi.org/10.1063/1.1646444
Publication status	Published - 1 Jan 2004

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10.1063/1.1646444

Cite this

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title = "Diffraction stress analysis in fiber-textured TiN thin films grown by ion-beam sputtering: Application to (001) and mixed (001)+(111) texture",

author = "G Abadias and Yau Tse",

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