@article{b5fa3d222e334d22b690b34d9dce0f0a,
title = "Development of a novel process chain based on Atomic Force Microscopy scratching for small and medium series production of polymer nano structure components",
author = "EB Brousseau and F Krohs and E Caillaud and Stefan Dimov and O Gibaru and S Fatikow",
year = "2010",
month = jun,
day = "1",
doi = "10.1115/1.4001481",
language = "English",
volume = "132",
pages = "n/a",
journal = "Journal of Manufacturing Science and Engineering",
publisher = "ASME (American Society of Mechanical Engineers)",
number = "3",
}