Original language | English |
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Pages (from-to) | 850 |
Number of pages | 1 |
Journal | Microelectronic Engineering |
Volume | 85 |
Issue number | 5-6 |
Publication status | Published - 1 Jan 2008 |
Development and validation of functional imprint material for the step and flash imprint lithography process
J Kettle, P Coppo, G Lalev, C Tattershall, Stefan Dimov, ML Turner
Research output: Contribution to journal › Article
16
Citations
(Scopus)