Development and validation of functional imprint material for the step and flash imprint lithography process

J Kettle, P Coppo, G Lalev, C Tattershall, Stefan Dimov, ML Turner

Research output: Contribution to journalArticle

16 Citations (Scopus)
Original languageEnglish
Pages (from-to)850
Number of pages1
JournalMicroelectronic Engineering
Issue number5-6
Publication statusPublished - 1 Jan 2008

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