| Original language | English |
|---|---|
| Publication status | Published - 17 Mar 2002 |
| Event | Proceedings of MEMS - Duration: 17 Mar 2002 → … |
Conference
| Conference | Proceedings of MEMS |
|---|---|
| Period | 17/03/02 → … |
Design and fabrication of a micro reciprocating engine for the time multiplexed deep etching process
Kyle Jiang, Peng Jin, Philip Prewett
Research output: Contribution to conference (unpublished) › Paper