Design and analysis of a micro receiprocating engine for the time multiplexed deep etching process

Kyle Jiang, H Yang, Philip Prewett

Research output: Contribution to conference (unpublished)Paper

Original languageEnglish
Publication statusPublished - 1 Sep 2001
EventProceedings of MEMS Conference -
Duration: 1 Sep 2001 → …

Conference

ConferenceProceedings of MEMS Conference
Period1/09/01 → …

Cite this