Cryogenic performance of micromachined silicon rocking actuator for tuning a superconducting resonator

Yi Wang, MJ Prest, Michael Lancaster

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

A micromachined silicon rocking actuator is used to tune a high temperature superconducting resonator. Its performance at cryogenic temperatures from 77 to 30 K is studied. A significant increase in the quality factor of the resonator, from 376 to 13876, is observed. It is confirmed that the change in resistance of the silicon tuning probe with temperature is the main factor responsible for the improvement. At low temperature, the silicon becomes an excellent dielectric, which makes it a good material for low-loss tuners.
Original languageEnglish
Pages (from-to)1569-1570
Number of pages2
JournalElectronics Letters
Volume46
Issue number23
DOIs
Publication statusPublished - 1 Nov 2010

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