A micromachined silicon rocking actuator is used to tune a high temperature superconducting resonator. Its performance at cryogenic temperatures from 77 to 30 K is studied. A significant increase in the quality factor of the resonator, from 376 to 13876, is observed. It is confirmed that the change in resistance of the silicon tuning probe with temperature is the main factor responsible for the improvement. At low temperature, the silicon becomes an excellent dielectric, which makes it a good material for low-loss tuners.
|Number of pages||2|
|Publication status||Published - 1 Nov 2010|