Creation of Liquid Metal 3D Microstructures Using Dielectrophoresis

Patterning customized arrays of microscale Galinstan or EGaIn liquid metals enables the creation of a variety of microfabricated systems. Current techniques for creating microsized 3D structures of liquid metals are limited by the large dimension or low aspect ratio of such structures, and time‐consuming processes. Here, a novel technique for creating 3D microstructures of Galinstan using dielectrophoresis is introduced. The presented technique enables the rapid creation of Galinstan microstructures with various dimensions and aspect ratios. Two series of proof‐of‐concept experiments are conducted to demonstrate the capabilities of this technique. First, the 3D Galinstan microstructures are utilized as 3D microelectrodes to enhance the trapping of tungsten trioxide (WO3) nanoparticles flowing through a microfluidic channel. Second, the patterned Galinstan microstructures are utilized as microfins to improve the dissipation of heat within a microfluidic channel that is located onto a hot spot. The presented technique can be readily used for creating customized arrays of 3D Galinstan microstructures for a wide range of applications.