Compensation of shadow effect for one-dimensional diffractive structures via an approach of microfabrication

Yongqi Fu; Ngoi Kok Ann Bryan; David Lee Butler

doi:10.1063/1.2018421

Compensation of shadow effect for one-dimensional diffractive structures via an approach of microfabrication

Yongqi Fu^*, Ngoi Kok Ann Bryan, David Lee Butler

^*Corresponding author for this work

Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

A compensation method is introduced from the microfabrication perspective for the purpose of degrading the shadow effect of diffractive structures. A dead blaze area ε that is generated during the fabrication process makes a great contribution to the shadow effect. Our experiments have demonstrated that it can be reduced by tilting the work stage to a certain angle during the direct writing of the focused ion beam (FIB). The redeposition effect, round effect, and discrimination error of the FIB affect the compensation of the shadow effect and cause the dead blaze area to still exist more or less after the compensation when the stage-tilting angle is less than 50°. The compensation can be further improved with the aid of chemical gas assistant etching. In addition, two important factors relevant to the compensation, characterization errors from atomic force microscopy and optical interferometry, and limitation of depth of focus, are discussed in detail.

Original language	English
Article number	093116
Journal	Review of Scientific Instruments
Volume	76
Issue number	9
DOIs	https://doi.org/10.1063/1.2018421
Publication status	Published - Sept 2005

Bibliographical note

Funding Information:
This research was supported in part by the Funding for Strategic Research Program on Ultra-precision Engineering of the Agency of Science, Technology and Research, Singapore (A-STAR), and by the program of Innovation in Manufacturing Systems and Technology (IMST), Singapore–Massachusetts Institute of Technology Alliance (SMA).

ASJC Scopus subject areas

Instrumentation

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10.1063/1.2018421

Cite this

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title = "Compensation of shadow effect for one-dimensional diffractive structures via an approach of microfabrication",

abstract = "A compensation method is introduced from the microfabrication perspective for the purpose of degrading the shadow effect of diffractive structures. A dead blaze area ε that is generated during the fabrication process makes a great contribution to the shadow effect. Our experiments have demonstrated that it can be reduced by tilting the work stage to a certain angle during the direct writing of the focused ion beam (FIB). The redeposition effect, round effect, and discrimination error of the FIB affect the compensation of the shadow effect and cause the dead blaze area to still exist more or less after the compensation when the stage-tilting angle is less than 50°. The compensation can be further improved with the aid of chemical gas assistant etching. In addition, two important factors relevant to the compensation, characterization errors from atomic force microscopy and optical interferometry, and limitation of depth of focus, are discussed in detail.",

author = "Yongqi Fu and Bryan, {Ngoi Kok Ann} and Butler, {David Lee}",

note = "Funding Information: This research was supported in part by the Funding for Strategic Research Program on Ultra-precision Engineering of the Agency of Science, Technology and Research, Singapore (A-STAR), and by the program of Innovation in Manufacturing Systems and Technology (IMST), Singapore–Massachusetts Institute of Technology Alliance (SMA).",

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N1 - Funding Information: This research was supported in part by the Funding for Strategic Research Program on Ultra-precision Engineering of the Agency of Science, Technology and Research, Singapore (A-STAR), and by the program of Innovation in Manufacturing Systems and Technology (IMST), Singapore–Massachusetts Institute of Technology Alliance (SMA).

PY - 2005/9

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N2 - A compensation method is introduced from the microfabrication perspective for the purpose of degrading the shadow effect of diffractive structures. A dead blaze area ε that is generated during the fabrication process makes a great contribution to the shadow effect. Our experiments have demonstrated that it can be reduced by tilting the work stage to a certain angle during the direct writing of the focused ion beam (FIB). The redeposition effect, round effect, and discrimination error of the FIB affect the compensation of the shadow effect and cause the dead blaze area to still exist more or less after the compensation when the stage-tilting angle is less than 50°. The compensation can be further improved with the aid of chemical gas assistant etching. In addition, two important factors relevant to the compensation, characterization errors from atomic force microscopy and optical interferometry, and limitation of depth of focus, are discussed in detail.

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Compensation of shadow effect for one-dimensional diffractive structures via an approach of microfabrication

Abstract

Bibliographical note

ASJC Scopus subject areas

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