Cold-isopress-based process for fabrication of stainless steel micromachine components

M Imbaby, Kyle Jiang

Research output: Contribution to journalArticle


This Letter presents in detail a new process for the fabrication of 3D stainless steel microcomponents using cold-isopressing techniques. The process starts by producing deep SU-8 master moulds and their negative soft micromoulds in polydimethylsiloxane (PDMS), preparing stainless steel semi-solid paste with high solid loading, filling the soft micromoulds, covering the filled moulds and putting them under hydrostatic pressure. After the pressure is released the green microparts are obtained, de-bound and sintered in vacuum at 1350 degrees C. The resultant microparts show the same quality as the SU-8 master moulds without deformation. The effect of applied hydrostatic pressure on the density of the green and sintered parts as well as the linear shrinkage is discussed in detail. The maximum density of the sintered parts and its corresponding linear shrinkage are found to be 98.6 and 13%, respectively.
Original languageEnglish
Pages (from-to)160-165
Number of pages6
JournalMicro & Nano Letters
Issue number3
Publication statusPublished - 1 Jan 2009


Dive into the research topics of 'Cold-isopress-based process for fabrication of stainless steel micromachine components'. Together they form a unique fingerprint.

Cite this