Abstract
In this paper, we present a full scale autofocus approach for scanning electron microscope (SEM). The optimal focus (in-focus) position of the microscope is achieved by maximizing the image sharpness using a vision-based closed-loop control scheme. An iterative optimization algorithm has been designed using the sharpness score derived from image gradient information. The proposed method has been implemented and validated using a tungsten gun SEM at various experimental conditions like varying raster scan speed, magnification at real-time. We demonstrate that the proposed autofocus technique is accurate, robust and fast.
Original language | English |
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Article number | 05003 |
Journal | MATEC Web of Conferences |
Volume | 32 |
DOIs | |
Publication status | Published - 2 Dec 2015 |
Event | International Symposium of Optomechatronics Technology, ISOT 2015 - Neuchatel, Switzerland Duration: 14 Oct 2015 → 16 Oct 2015 |
Bibliographical note
Publisher Copyright:© 2015 Owned by the authors, published by EDP Sciences.
ASJC Scopus subject areas
- General Chemistry
- General Materials Science
- General Engineering