Chemically amplified polysubstituted triphenylene derivatives as high sensitivity electron-beam resists

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@article{a507e17778f54f6baee22e2593b1323a,

title = "Chemically amplified polysubstituted triphenylene derivatives as high sensitivity electron-beam resists",

author = "\{Mohd Zaid\}, Hasnah and Alexander Robinson and Richard Palmer and Mayandithevar Manickam and Jon Preece",

year = "2005",

month = jan,

day = "1",

language = "English",

journal = "Journal Vac. Sci. Technol. B",

}