Chemically amplified phenolic fullerene electron beam resist

Dongxu Yang, A. Frommhold, X. Xue, R. E. Palmer, Alexander Robinson

Research output: Contribution to journal › Article › peer-review

18 Citations (Scopus)

291 Downloads (Pure)

2 results

Finished
IAA 2012 - FOF: A Fullerene Resist to Enable Next Generation Semiconductor Fabrication
Robinson, A.
Engineering & Physical Science Research Council
1/04/13 → 31/03/14
Project: Research Councils
Impact Acceleration Account - UOB 2012
Tickell, A.
Engineering & Physical Science Research Council
1/10/12 → 31/03/17
Project: Research Councils