Chemically amplified molecular resists for electron beam lithography

A.P.G. Robinson, H.M. Zaid, F.P. Gibbons, R.E. Palmer, M. Manickam, J.A. Preece, R. Brainard, T. Zampini, K. O'Connell

Research output: Contribution to journalArticlepeer-review

32 Citations (Scopus)
Original languageUndefined/Unknown
JournalMicroelectronic Engineering
DOIs
Publication statusPublished - 2006

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