Chemically amplified molecular resists for e-beam lithography

F.P. Gibbons, J. Manyam, S. Diegoli, M. Manickam, J.A. Preece, R.E. Palmer, A.P.G. Robinson

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)
Original languageUndefined/Unknown
JournalMicroelectronic Engineering
DOIs
Publication statusPublished - 2008

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