Chemical mechanical planarisation

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Original language	English
Title of host publication	Nanofinishing Science and Technology
Subtitle of host publication	Basic and Advanced Finishing and Polishing Processes
Publisher	CRC Press
Pages	597-616
Number of pages	20
ISBN (Electronic)	9781315404097
ISBN (Print)	9781498745949
DOIs	https://doi.org/10.1201/9781315404103
Publication status	Published - 12 Dec 2016

ASJC Scopus subject areas

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