Characterization of surface properties of ordered nanostructures using SEM stereoscopic technique

Ali Mohammadkhani; Majid Malboubi; Carl Anthony; Kyle Jiang

doi:10.1016/j.mee.2010.12.039

Characterization of surface properties of ordered nanostructures using SEM stereoscopic technique

Ali Mohammadkhani, Majid Malboubi, Carl Anthony, Kyle Jiang

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6 Citations (Scopus)

Abstract

In this paper, a low-cost and high-throughput method for fabrication of large area ordered nanostructure is presented and the obtained structures are characterized using SEM stereoscopic technique for 3D-reconstruction of nanostructures to calculate the surface properties. The results show two kinds of deformations, including narrow waves of the surface, due to the embedment of nanospheres to the photoresist, and irregular ups and downs in surface structure, which could be caused by fabrication process faults. This approach provides a simple and efficient way to measure the morphological parameters in flat nanometre-sized structures. (C) 2010 Elsevier B.V. All rights reserved.

Original language	English
Pages (from-to)	2687-2690
Number of pages	4
Journal	Microelectronic Engineering
Volume	88
Issue number	8
DOIs	https://doi.org/10.1016/j.mee.2010.12.039
Publication status	Published - 1 Aug 2011

Keywords

SEM stereoscopic technique
Nanosphere photolithography
3D-reconstruction
Nanostructures

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10.1016/j.mee.2010.12.039

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title = "Characterization of surface properties of ordered nanostructures using SEM stereoscopic technique",

abstract = "In this paper, a low-cost and high-throughput method for fabrication of large area ordered nanostructure is presented and the obtained structures are characterized using SEM stereoscopic technique for 3D-reconstruction of nanostructures to calculate the surface properties. The results show two kinds of deformations, including narrow waves of the surface, due to the embedment of nanospheres to the photoresist, and irregular ups and downs in surface structure, which could be caused by fabrication process faults. This approach provides a simple and efficient way to measure the morphological parameters in flat nanometre-sized structures. (C) 2010 Elsevier B.V. All rights reserved.",

keywords = "SEM stereoscopic technique, Nanosphere photolithography, 3D-reconstruction, Nanostructures",

author = "Ali Mohammadkhani and Majid Malboubi and Carl Anthony and Kyle Jiang",

year = "2011",

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doi = "10.1016/j.mee.2010.12.039",

language = "English",

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journal = "Microelectronic Engineering",

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TY - JOUR

T1 - Characterization of surface properties of ordered nanostructures using SEM stereoscopic technique

AU - Mohammadkhani, Ali

AU - Malboubi, Majid

AU - Anthony, Carl

AU - Jiang, Kyle

PY - 2011/8/1

Y1 - 2011/8/1

N2 - In this paper, a low-cost and high-throughput method for fabrication of large area ordered nanostructure is presented and the obtained structures are characterized using SEM stereoscopic technique for 3D-reconstruction of nanostructures to calculate the surface properties. The results show two kinds of deformations, including narrow waves of the surface, due to the embedment of nanospheres to the photoresist, and irregular ups and downs in surface structure, which could be caused by fabrication process faults. This approach provides a simple and efficient way to measure the morphological parameters in flat nanometre-sized structures. (C) 2010 Elsevier B.V. All rights reserved.

AB - In this paper, a low-cost and high-throughput method for fabrication of large area ordered nanostructure is presented and the obtained structures are characterized using SEM stereoscopic technique for 3D-reconstruction of nanostructures to calculate the surface properties. The results show two kinds of deformations, including narrow waves of the surface, due to the embedment of nanospheres to the photoresist, and irregular ups and downs in surface structure, which could be caused by fabrication process faults. This approach provides a simple and efficient way to measure the morphological parameters in flat nanometre-sized structures. (C) 2010 Elsevier B.V. All rights reserved.

KW - SEM stereoscopic technique

KW - Nanosphere photolithography

KW - 3D-reconstruction

KW - Nanostructures

U2 - 10.1016/j.mee.2010.12.039

DO - 10.1016/j.mee.2010.12.039

M3 - Article

SN - 1873-5568

VL - 88

SP - 2687

EP - 2690

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 8

ER -

Characterization of surface properties of ordered nanostructures using SEM stereoscopic technique

Abstract

Keywords

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