Fingerprint
Dive into the research topics of 'Characterization of sidewall roughness for silicon microstructures in micro actuator'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Characterization of sidewall roughness for silicon microstructures in micro actuator
G Han, Z Jiang, W Jing, J Gao, Philip Prewett, Kyle Jiang
Research output: Contribution to journal › Article