Characteristics of the Ti2N layer produced by an ion assisted deposition method

C Ruset, E Grigore, GA Collins, KT Short, F Rossi, N Gibson, Hanshan Dong, Thomas Bell

Research output: Contribution to conference (unpublished)Paper

46 Citations (Scopus)
Original languageEnglish
Pages698-703
Number of pages6
DOIs
Publication statusPublished - 1 Sept 2003
Event8th International Conference on Plasma Surface Engineering, Sep 09-13, 2002. GARMISCH PARTENKI, Germany -
Duration: 1 Sept 2003 → …

Conference

Conference8th International Conference on Plasma Surface Engineering, Sep 09-13, 2002. GARMISCH PARTENKI, Germany
Period1/09/03 → …

Keywords

  • stress analysis
  • ion implantation
  • instrumented indentation
  • wear
  • magnetron sputtering

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