Characterisation of the Effects of Base Additives on a Fullerene Chemically Amplified Resist

J Manyam, Mayandithevar Manickam, Jon Preece, Richard Palmer, Alexander Robinson

Research output: Contribution to journal › Article

Cite this

@article{619535342b4b4d2b8c71ebd142c5e747,

title = "Characterisation of the Effects of Base Additives on a Fullerene Chemically Amplified Resist",

author = "J Manyam and Mayandithevar Manickam and Jon Preece and Richard Palmer and Alexander Robinson",

year = "2010",

month = jan,

day = "1",

language = "English",

journal = "P.Soc.Photo-Opt.Inst.7273, 72733D, 2010",

}