Characterisation of a micro-engineered selective strain-coupling structure using Raman spectroscopy

This paper reports the physical characterization of a novel micro-electro mechanical system (MEMS) packaging structure using micro Raman spectroscopy. The structure is designed to reduce the effects of unwanted residual packaging strain on a resonant strain gauge device. It does this by maintaining the resonator alignment and selectively coupling the resonator to strain in one degree of freedom only. Previous work has demonstrated the ability of the structure to maintain resonator alignment. In this work, the ability of the structure to provide selective coupling is determined experimentally using micro Raman spectroscopy. The experimental results are shown to agree well with the predicted performance of the structure.