Calibration of AFM cantilever spring constants

CT Gibson, BL Weeks, C Abell, Trevor Rayment, S Myhra

Research output: Contribution to journalArticle

43 Citations (Scopus)

Abstract

In this paper we present two simple, reliable and readily applicable methods for calibrating cantilevers and measuring the thickness of thin gold films. The spring constant calibration requires knowledge of the Young's modulus, density of the cantilever and resonant frequency. The thickness of thin gold layers was determined by measuring changes in the resonant frequency and Q-factor of beam shaped AFM cantilevers before and after coating.The techniques for measuring the spring constant and thin film thickness provide accuracy on the order of 10-15%.
Original languageEnglish
Pages (from-to)113-118
Number of pages6
JournalUltramicroscopy
Volume97
DOIs
Publication statusPublished - 1 Jan 2003

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