Behaviour of silicon diaphragms for micromachined capacitive pressure sensor

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	422-427
Number of pages	6
Journal	Journal of Advances in Science and Technology
Volume	54
Publication status	Published - 17 Mar 2008

Cite this

@article{2c2f874eecbd4421934237272a29326b,

title = "Behaviour of silicon diaphragms for micromachined capacitive pressure sensor",

author = "Juan Ren and David Cheneler and Michael Ward and P Kinnell",

year = "2008",

month = mar,

day = "17",

language = "English",

volume = "54",

pages = "422--427",

journal = "Journal of Advances in Science and Technology",

}