Automated optical inspection method for MEMS fabrication

M Yang, Marco Castellani, R Landot, F Beyeler, Z Wang, Duc Pham

Research output: Contribution to conference (unpublished) › Paper

4 Citations (Scopus)

Original language	English
Pages	1923-1931
Number of pages	9
DOIs	https://doi.org/10.1109/ICMA.2010.5589223
Publication status	Published - 1 Jan 2010
Event	Proceedings IEEE International Conference on Mechatronics and Automation (ICMA 2010) - Duration: 1 Jan 2010 → …

Conference	Proceedings IEEE International Conference on Mechatronics and Automation (ICMA 2010)
Period	1/01/10 → …

Access to Document

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title = "Automated optical inspection method for MEMS fabrication",

author = "M Yang and Marco Castellani and R Landot and F Beyeler and Z Wang and Duc Pham",

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note = "Proceedings IEEE International Conference on Mechatronics and Automation (ICMA 2010) ; Conference date: 01-01-2010",

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TY - CONF

T1 - Automated optical inspection method for MEMS fabrication

AU - Yang, M

AU - Castellani, Marco

AU - Landot, R

AU - Beyeler, F

AU - Wang, Z

AU - Pham, Duc

PY - 2010/1/1

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DO - 10.1109/ICMA.2010.5589223

M3 - Paper

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EP - 1931

T2 - Proceedings IEEE International Conference on Mechatronics and Automation (ICMA 2010)

Y2 - 1 January 2010

ER -