Analysis of MEMS mechanical spring for coupling multimodal micro resonators sensor

Nor Saad, Raya Al-Dadah, Carl Anthony, Michael Ward

Research output: Contribution to conference (unpublished) › Paper

10 Citations (Scopus)

Original language	English
Pages	1190-1193
Number of pages	4
DOIs	https://doi.org/10.1016/j.mee.2008.11.092
Publication status	Published - 1 Apr 2009
Event	34th International Conference on Micro- and Nano-Engineering, Sep 15-18, 2008. Athens, Greece - Duration: 1 Apr 2009 → …

Conference	34th International Conference on Micro- and Nano-Engineering, Sep 15-18, 2008. Athens, Greece
Period	1/04/09 → …

Keywords

@conference{5f2273bf2eff44afa3b19f81346921b2,

title = "Analysis of MEMS mechanical spring for coupling multimodal micro resonators sensor",

keywords = "Coupled micro resonator array sensor, Finite element analysis, Butterfly shaped MEMS spring",

author = "Nor Saad and Raya Al-Dadah and Carl Anthony and Michael Ward",

year = "2009",

month = apr,

day = "1",

doi = "10.1016/j.mee.2008.11.092",

language = "English",

pages = "1190--1193",

note = "34th International Conference on Micro- and Nano-Engineering, Sep 15-18, 2008. Athens, Greece ; Conference date: 01-04-2009",

}

TY - CONF

T1 - Analysis of MEMS mechanical spring for coupling multimodal micro resonators sensor

AU - Saad, Nor

AU - Al-Dadah, Raya

AU - Anthony, Carl

AU - Ward, Michael

PY - 2009/4/1

Y1 - 2009/4/1

KW - Coupled micro resonator array sensor

KW - Finite element analysis

KW - Butterfly shaped MEMS spring

U2 - 10.1016/j.mee.2008.11.092

DO - 10.1016/j.mee.2008.11.092

M3 - Paper

SP - 1190

EP - 1193

T2 - 34th International Conference on Micro- and Nano-Engineering, Sep 15-18, 2008. Athens, Greece

Y2 - 1 April 2009

ER -