An ultrathick SU-8 process using UV-lithography

Kyle Jiang; Peng Jin

An ultrathick SU-8 process using UV-lithography

Kyle Jiang
, Peng Jin

Mechanical Engineering

Research output: Contribution to conference (unpublished) › Paper

Original language	English
Pages	45-49
Number of pages	5
Publication status	Published - 31 Dec 2003
Event	Proceedings of the 3rd International IEEE Conference on Polymers and Adhesives in Microelectronics and Photonics - Duration: 31 Dec 2003 → …

Conference

Conference	Proceedings of the 3rd International IEEE Conference on Polymers and Adhesives in Microelectronics and Photonics
Period	31/12/03 → …

Cite this

@conference{f08f1576bac74897bcd82c0832772ced,

title = "An ultrathick SU-8 process using UV-lithography",

author = "Kyle Jiang and Peng Jin",

year = "2003",

month = dec,

day = "31",

language = "English",

pages = "45--49",

note = "Proceedings of the 3rd International IEEE Conference on Polymers and Adhesives in Microelectronics and Photonics ; Conference date: 31-12-2003",

}