Alumina composite suspension preparation for softlithography microfabrication

H Hassanin, Kyle Jiang

Mechanical Engineering

Research output: Contribution to conference (unpublished) › Paper

23 Citations (Scopus)

23 Citations
1 Article

1 results

2009
Alumina composite suspension preparation for softlithography microfabrication
Hassanin, H. & Jiang, K., 1 Apr 2009, In: Microelectronic Engineering. 86, 4-6, p. 929-932 4 p.
Research output: Contribution to journal › Article › peer-review
23 Citations (Scopus)