Alumina composite suspension preparation for softlithography microfabrication

Research output: Contribution to conference (unpublished) › Paper

23 Citations (Scopus)

Original language	English
Pages	929-932
Number of pages	4
Publication status	Published - 1 Apr 2009
Event	34th International Conference on Micro- and Nano-Engineering, Sep 15-18, 2008. Athens, Greece - Duration: 1 Apr 2009 → …

Conference	34th International Conference on Micro- and Nano-Engineering, Sep 15-18, 2008. Athens, Greece
Period	1/04/09 → …

Keywords

Alumina composite suspension preparation for softlithography microfabrication
Hassanin, H. & Jiang, K., 1 Apr 2009, In: Microelectronic Engineering. 86, 4-6, p. 929-932 4 p.
Research output: Contribution to journal › Article › peer-review
23 Citations (Scopus)

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title = "Alumina composite suspension preparation for softlithography microfabrication",

keywords = "Softlithography, Alumina, Microfabrication, Composites",

author = "H Hassanin and Kyle Jiang",

year = "2009",

month = apr,

day = "1",

language = "English",

pages = "929--932",

note = "34th International Conference on Micro- and Nano-Engineering, Sep 15-18, 2008. Athens, Greece ; Conference date: 01-04-2009",

}

TY - CONF

T1 - Alumina composite suspension preparation for softlithography microfabrication

AU - Hassanin, H

AU - Jiang, Kyle

PY - 2009/4/1

Y1 - 2009/4/1

KW - Softlithography

KW - Alumina

KW - Microfabrication

KW - Composites

M3 - Paper

SP - 929

EP - 932

T2 - 34th International Conference on Micro- and Nano-Engineering, Sep 15-18, 2008. Athens, Greece

Y2 - 1 April 2009

ER -