A triphenylene derivative as a novel negative/positive tone resist of 10 nanometer resolution

T Tada, T Kanayama, Alexander Robinson, Richard Palmer, Matthew Allen, Jon Preece, Kenneth Harris

Research output: Contribution to conference (unpublished) › Paper

19 Citations (Scopus)

Original language	English
Pages	425-428
Number of pages	4
Publication status	Published - 1 Jun 2000
Event	25th International Conference on Micro- and Nano-Engineering, Sep 21-23, 1999. ROME, Italy - Duration: 1 Jun 2000 → …

Conference	25th International Conference on Micro- and Nano-Engineering, Sep 21-23, 1999. ROME, Italy
Period	1/06/00 → …

Cite this

@conference{324ed66c21a443d98ca350868eaabd5c,

title = "A triphenylene derivative as a novel negative/positive tone resist of 10 nanometer resolution",

author = "T Tada and T Kanayama and Alexander Robinson and Richard Palmer and Matthew Allen and Jon Preece and Kenneth Harris",

year = "2000",

month = jun,

day = "1",

language = "English",

pages = "425--428",

note = "25th International Conference on Micro- and Nano-Engineering, Sep 21-23, 1999. ROME, Italy ; Conference date: 01-06-2000",

}

TY - CONF

T1 - A triphenylene derivative as a novel negative/positive tone resist of 10 nanometer resolution

AU - Tada, T

AU - Kanayama, T

AU - Robinson, Alexander

AU - Palmer, Richard

AU - Allen, Matthew

AU - Preece, Jon

AU - Harris, Kenneth

PY - 2000/6/1

Y1 - 2000/6/1

M3 - Paper

SP - 425

EP - 428

T2 - 25th International Conference on Micro- and Nano-Engineering, Sep 21-23, 1999. ROME, Italy

Y2 - 1 June 2000

ER -