A SU8 micromachined WR-1.5 band waveguide filter

X. Shang; Y. Tian; M.J. Lancaster; S. Singh

doi:10.1109/LMWC.2013.2260733

A SU8 micromachined WR-1.5 band waveguide filter

X. Shang
, Y. Tian
, M.J. Lancaster
, S. Singh

Electronic, Electrical and Systems Engineering

Research output: Contribution to journal › Article › peer-review

27 Citations (Scopus)

Abstract

A WR-1.5 band (500-750 GHz) waveguide 3rd order bandpass filter has been designed, fabricated, using SU8 photoresist technology, tested and presented. The filter is composed of three silver-coated SU8 layers, each of the same nominal thickness of 191 μ m. This filter structure is based on three offset resonators. This novel structure is ideally suitable for the layered SU8 micromachining process. The filter exhibits a 53.7 GHz 3-dB bandwidth at a central frequency of 671 GHz. The median passband insertion loss is measured to be 0.65 dB and the return loss is better than 11 dB over the whole passband.

Original language	English
Pages (from-to)	300-302
Number of pages	3
Journal	IEEE Microwave and Wireless Components Letters
Volume	23
Issue number	6
DOIs	https://doi.org/10.1109/LMWC.2013.2260733
Publication status	Published - 1 Jan 2013

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10.1109/LMWC.2013.2260733

Terahertz Micromachined Resonator Superstructures
Lancaster, M. (Principal Investigator), Gardner, P. (Co-Investigator) & Huang, F. (Co-Investigator)
Engineering & Physical Science Research Council
1/06/10 → 30/11/13
Project: Research Councils

Cite this

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ER -

A SU8 micromachined WR-1.5 band waveguide filter

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Terahertz Micromachined Resonator Superstructures

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