A SU8 micromachined WR-1.5 band waveguide filter

X. Shang, Y. Tian, M.J. Lancaster, S. Singh

Research output: Contribution to journalArticlepeer-review

27 Citations (Scopus)


A WR-1.5 band (500-750 GHz) waveguide 3rd order bandpass filter has been designed, fabricated, using SU8 photoresist technology, tested and presented. The filter is composed of three silver-coated SU8 layers, each of the same nominal thickness of 191 μ m. This filter structure is based on three offset resonators. This novel structure is ideally suitable for the layered SU8 micromachining process. The filter exhibits a 53.7 GHz 3-dB bandwidth at a central frequency of 671 GHz. The median passband insertion loss is measured to be 0.65 dB and the return loss is better than 11 dB over the whole passband.
Original languageEnglish
Pages (from-to)300-302
Number of pages3
JournalIEEE Microwave and Wireless Components Letters
Issue number6
Publication statusPublished - 1 Jan 2013


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