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Abstract
A WR-1.5 band (500-750 GHz) waveguide 3rd order bandpass filter has been designed, fabricated, using SU8 photoresist technology, tested and presented. The filter is composed of three silver-coated SU8 layers, each of the same nominal thickness of 191 μ m. This filter structure is based on three offset resonators. This novel structure is ideally suitable for the layered SU8 micromachining process. The filter exhibits a 53.7 GHz 3-dB bandwidth at a central frequency of 671 GHz. The median passband insertion loss is measured to be 0.65 dB and the return loss is better than 11 dB over the whole passband.
Original language | English |
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Pages (from-to) | 300-302 |
Number of pages | 3 |
Journal | IEEE Microwave and Wireless Components Letters |
Volume | 23 |
Issue number | 6 |
DOIs | |
Publication status | Published - 1 Jan 2013 |
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Dive into the research topics of 'A SU8 micromachined WR-1.5 band waveguide filter'. Together they form a unique fingerprint.Projects
- 1 Finished
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Terahertz Micromachined Resonator Superstructures
Lancaster, M., Gardner, P. & Huang, F.
Engineering & Physical Science Research Council
1/06/10 → 30/11/13
Project: Research Councils