A soft moulding process for manufacture of net-shape ceramic microcomponents

Z Zhu, Hany Hassanin, Kyle Jiang

Research output: Contribution to journalArticle

21 Citations (Scopus)


A soft moulding process for manufacture of ceramic microcomponents, alumina and Al2O3/SiC composite, is introduced in this paper. The process involves fabrication of SU-8 master moulds and production of mirrored polydimethysiloxane (PDMS) soft moulds. Green parts are formed in the PDMS moulds by filling the ceramic slurry into the soft moulds and net-shape green components are obtained after demoulding. The methods for the mould filling using different suspensions were demonstrated: one was aqueous suspension for alumina microcomponent and another was non-aqueous suspension for Al2O3/SiC microcomponent. The measurements showed that the proposed soft lithography process is successful in producing ceramic microcomponents and retaining the fine features in micron scale.
Original languageEnglish
JournalInternational Journal for Advanced Manufacturing Technology
Publication statusPublished - 17 Mar 2009


  • Soft moulding
  • SU-8
  • Alumina
  • Microcomponents
  • Soft lithography
  • Al2O3/SiC


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