Abstract
A soft moulding process for manufacture of ceramic microcomponents, alumina and Al2O3/SiC composite, is introduced in this paper. The process involves fabrication of SU-8 master moulds and production of mirrored polydimethysiloxane (PDMS) soft moulds. Green parts are formed in the PDMS moulds by filling the ceramic slurry into the soft moulds and net-shape green components are obtained after demoulding. The methods for the mould filling using different suspensions were demonstrated: one was aqueous suspension for alumina microcomponent and another was non-aqueous suspension for Al2O3/SiC microcomponent. The measurements showed that the proposed soft lithography process is successful in producing ceramic microcomponents and retaining the fine features in micron scale.
| Original language | English |
|---|---|
| Journal | International Journal for Advanced Manufacturing Technology |
| DOIs | |
| Publication status | Published - 17 Mar 2009 |
Keywords
- Soft moulding
- SU-8
- Alumina
- Microcomponents
- Soft lithography
- Al2O3/SiC