A simple technique to increase the quality factor of micro-mechanical resonators

RG Turnbull, Michael Ward, S Collins, Carl Anthony

Research output: Contribution to conference (unpublished) › Paper › peer-review

Original language	English
Pages	73181G-73181G-8
Publication status	Published - 1 Jan 2009
Event	Proceedings of SPIE: Micro- and Nanotechnology Sensors, Systems, and Applications - Duration: 1 Jan 2009 → …

Conference	Proceedings of SPIE: Micro- and Nanotechnology Sensors, Systems, and Applications
Period	1/01/09 → …

Cite this

@conference{f77b1bd39e844b5a84afa4789815a614,

title = "A simple technique to increase the quality factor of micro-mechanical resonators",

author = "RG Turnbull and Michael Ward and S Collins and Carl Anthony",

year = "2009",

month = jan,

day = "1",

language = "English",

pages = "73181G--73181G--8",

note = "Proceedings of SPIE: Micro- and Nanotechnology Sensors, Systems, and Applications ; Conference date: 01-01-2009",

}