A novel MOEMS based adaptive optic for X-ray focusing

Mohamad Al-Aioubi; Philip Prewett; SE Huq; V Djakov; AG Michette

doi:10.1016/j.mee.2006.01.107

A novel MOEMS based adaptive optic for X-ray focusing

Mohamad Al-Aioubi, Philip Prewett, SE Huq, V Djakov, AG Michette

Mechanical Engineering

Research output: Contribution to journal › Article

10 Citations (Scopus)

Abstract

This work presents the design and micro fabrication of a novel X-ray micro-optical system for use in an X-ray microprobe for analysis of biological cells. A reflective microoptoelectromechanical system capable of focusing a wide range of wavelengths has been developed. The lens system consists of a pair of microfabricated optical elements, one of which has variable curvature providing a unique mechanically-actuated zoom focusing capability. Experiments have been carried out to measure the changes of the focal length (lens curvature) and for system calibration. (c) 2006 Elsevier B.V. All rights reserved.

Original language	English
Pages (from-to)	1321-1325
Number of pages	5
Journal	Microelectronic Engineering
Volume	83
DOIs	https://doi.org/10.1016/j.mee.2006.01.107
Publication status	Published - 1 Apr 2006

Keywords

adaptive optics
MOEMS
MOXI
novel X-ray optics

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10.1016/j.mee.2006.01.107

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title = "A novel MOEMS based adaptive optic for X-ray focusing",

abstract = "This work presents the design and micro fabrication of a novel X-ray micro-optical system for use in an X-ray microprobe for analysis of biological cells. A reflective microoptoelectromechanical system capable of focusing a wide range of wavelengths has been developed. The lens system consists of a pair of microfabricated optical elements, one of which has variable curvature providing a unique mechanically-actuated zoom focusing capability. Experiments have been carried out to measure the changes of the focal length (lens curvature) and for system calibration. (c) 2006 Elsevier B.V. All rights reserved.",

keywords = "adaptive optics, MOEMS, MOXI, novel X-ray optics",

author = "Mohamad Al-Aioubi and Philip Prewett and SE Huq and V Djakov and AG Michette",

year = "2006",

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doi = "10.1016/j.mee.2006.01.107",

language = "English",

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journal = "Microelectronic Engineering",

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T1 - A novel MOEMS based adaptive optic for X-ray focusing

AU - Al-Aioubi, Mohamad

AU - Prewett, Philip

AU - Huq, SE

AU - Djakov, V

AU - Michette, AG

PY - 2006/4/1

Y1 - 2006/4/1

N2 - This work presents the design and micro fabrication of a novel X-ray micro-optical system for use in an X-ray microprobe for analysis of biological cells. A reflective microoptoelectromechanical system capable of focusing a wide range of wavelengths has been developed. The lens system consists of a pair of microfabricated optical elements, one of which has variable curvature providing a unique mechanically-actuated zoom focusing capability. Experiments have been carried out to measure the changes of the focal length (lens curvature) and for system calibration. (c) 2006 Elsevier B.V. All rights reserved.

AB - This work presents the design and micro fabrication of a novel X-ray micro-optical system for use in an X-ray microprobe for analysis of biological cells. A reflective microoptoelectromechanical system capable of focusing a wide range of wavelengths has been developed. The lens system consists of a pair of microfabricated optical elements, one of which has variable curvature providing a unique mechanically-actuated zoom focusing capability. Experiments have been carried out to measure the changes of the focal length (lens curvature) and for system calibration. (c) 2006 Elsevier B.V. All rights reserved.

KW - adaptive optics

KW - MOEMS

KW - MOXI

KW - novel X-ray optics

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U2 - 10.1016/j.mee.2006.01.107

DO - 10.1016/j.mee.2006.01.107

M3 - Article

SN - 1873-5568

VL - 83

SP - 1321

EP - 1325

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -

A novel MOEMS based adaptive optic for X-ray focusing

Abstract

Keywords

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