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A novel method of manufacturing optical gratings using the one step DRIE process

  • Anthony Cooper
  • , Peter Docker
  • , Philip Prewett
  • , Michael Ward

Research output: Contribution to conference (unpublished)Paper

Original languageEnglish
Publication statusPublished - 2 Dec 2004
EventNanotech 2005 -
Duration: 2 Dec 2004 → …

Conference

ConferenceNanotech 2005
Period2/12/04 → …

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