A novel method for determining optimum etch times for the one step dry release process

Peter Docker, Peter Kinnell, Michael Ward

Research output: Contribution to conference (unpublished) › Paper

Original languageEnglish
Publication statusPublished - 12 Mar 2004
EventNano-Tech 2004 Conference -
Duration: 12 Mar 2004 → …

Conference

ConferenceNano-Tech 2004 Conference
Period12/03/04 → …

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