A novel MEMS fabricated on a flexible membrane

Mohamad Al-Aioubi, Philip Prewett, SE Huq, V Djakov, AG Michette

Research output: Contribution to conference (unpublished) › Paper

Original languageEnglish
Publication statusPublished - 25 Nov 2005
EventMNE 05 -
Duration: 25 Nov 2005 → …

Conference

ConferenceMNE 05
Period25/11/05 → …

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