A methodology for evaluating the technological maturity of micro and nano fabrication processes

EB Brousseau, R Barton, Stefan Dimov, S Bigot

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Fifth international precision assembly seminar, 1/02/10
Publication status	Published - 1 Feb 2010

Cite this

@inproceedings{45e361d1fd3a4fc39aede57e43eebd34,

title = "A methodology for evaluating the technological maturity of micro and nano fabrication processes",

author = "EB Brousseau and R Barton and Stefan Dimov and S Bigot",

year = "2010",

month = feb,

day = "1",

language = "English",

booktitle = "Fifth international precision assembly seminar, 1/02/10",

}