A methodology for evaluating the technological maturity of micro and nano fabrication processes

EB Brousseau, R Barton, Stefan Dimov, S Bigot

Research output: Contribution to conference (unpublished)Paper

12 Citations (Scopus)
Original languageEnglish
Pages329-336
Number of pages8
Publication statusPublished - 1 Feb 2010
EventFifth international precision assembly seminar -
Duration: 1 Feb 2010 → …

Conference

ConferenceFifth international precision assembly seminar
Period1/02/10 → …

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