A MEMS Wankel rotary engine for time multiplexed plasma fabrication

Kyle Jiang; Philip Prewett

A MEMS Wankel rotary engine for time multiplexed plasma fabrication

Kyle Jiang, Philip Prewett

Mechanical Engineering

Research output: Contribution to conference (unpublished) › Paper

Original language	English
Publication status	Published - 17 Mar 2002
Event	Proceedings of the 9th International Symposium on Transport Phenomena and Dynamics of Rotating Machinery (ISROMAC-9) - Duration: 17 Mar 2002 → …

Conference

Conference	Proceedings of the 9th International Symposium on Transport Phenomena and Dynamics of Rotating Machinery (ISROMAC-9)
Period	17/03/02 → …

Cite this

@conference{8850c86ab15441cbaa5d825059988e57,

title = "A MEMS Wankel rotary engine for time multiplexed plasma fabrication",

author = "Kyle Jiang and Philip Prewett",

year = "2002",

month = mar,

day = "17",

language = "English",

note = "Proceedings of the 9th International Symposium on Transport Phenomena and Dynamics of Rotating Machinery (ISROMAC-9) ; Conference date: 17-03-2002",

}